APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section, & Chaio, J. (2001). Device and process technologies for MEMS and microelectronics II: 17-19 December 2001, Adelaide, Australia. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section, and Jung-Chih Chaio. Device and Process Technologies for MEMS and Microelectronics II: 17-19 December 2001, Adelaide, Australia. Bellingham, Washington: SPIE, 2001.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Device and Process Technologies for MEMS and Microelectronics II: 17-19 December 2001, Adelaide, Australia. SPIE, 2001.