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Electronics and structures for MEMS II : 17-19 December, 2001, Adelaide, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section
Other Authors:	Bergmann, Neil W.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4591.
Subjects:	Microelectromechanical systems > Congresses. Smart structures > Congresses. Microelectronics > Congresses.

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