rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electronics and structures for MEMS II
    sub title: 17-19 December, 2001, Adelaide, Australia
  title info:
    title: Electronics and structures for MEMS two
  title info:
    title: Electronics and structures for MEMS 2
  name:
    name part: Bergmann, Neil W.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: United States
    name part: Air Force.
    name part: Asian Office of Aerospace Research and Development.
  name:
    name part: Institute of Electrical and Electronics Engineers
    name part: South Australia Section.
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2001
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 392 pages : illustrations ; 28 cm.
  note: Neil W. Bergmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research Asian Office of Aerospace Research and Development [and others] ; cooperating organization, IEEE South Australia Section.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    genre: Congresses
  subject:
    topic: Smart structures
    genre: Congresses
  subject:
    topic: Microelectronics
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 4591
  identifier: 0819443212
  record info:
    record content source: LHL
    record creation date: 020221
    record change date: 20151024121550.0
    record identifier: in00001664576