Cover Image

Electronics and structures for MEMS II : 17-19 December, 2001, Adelaide, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section
Other Authors: Bergmann, Neil W.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4591.
Subjects:
Microelectromechanical systems > Congresses.
Smart structures > Congresses.
Microelectronics > Congresses.
Description
Physical Description:ix, 392 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819443212