Cover Image

MEMS and microsystems : design and manufacture /

Bibliographic Details
Main Author: Hsu, Tai-Ran
Format: Book
Language:English
Published: Boston : McGraw-Hill, [2002]
Subjects:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
Description
Physical Description:xii, 436 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references (pages 427-431) and index.
ISBN:0072393912 (alk. paper)