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Microsensors, MEMS, and smart devices /

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Bibliographic Details
Main Author:	Gardner, J. W. (Julian W.), 1958-
Other Authors:	Varadan, V. K., 1943-, Awadelkarim, Osama O.
Format:	Book
Language:	English
Published:	Chichester ; New York : J. Wiley, [2001]
Subjects:	Microelectromechanical systems. Detectors. Intelligent control systems.
Online Access:	Table of Contents

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