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Microsensors, MEMS, and smart devices /

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Bibliographic Details
Main Author: Gardner, J. W. (Julian W.), 1958-
Other Authors: Varadan, V. K., 1943-, Awadelkarim, Osama O.
Format: Book
Language:English
Published: Chichester ; New York : J. Wiley, [2001]
Subjects:
Microelectromechanical systems.
Detectors.
Intelligent control systems.
Online Access:Table of Contents
Description
Physical Description:xvi, 503 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:047186109X (alk. paper)