Cleanroom technology : fundamentals of design, testing, and operation /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Chichester ; New York :
J. Wiley,
[2001]
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| Subjects: |
| Item Description: | Includes index. |
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| Physical Description: | xiv, 309 pages : illustrations ; 24 cm. |
| ISBN: | 0471868426 (alk. paper) |