The MEMS handbook /

Bibliographic Details
Other Authors: El-Hak, M. Gad
Format: Book
Language:English
Published: Boca Raton, Fla. : CRC Press, [2002]
Series:Mechanical engineering handbook series.
Subjects:
Description
Physical Description:1 volume (various pagings) : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0849300770 (alk. paper)