The MEMS handbook /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. :
CRC Press,
[2002]
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| Series: | Mechanical engineering handbook series.
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| Subjects: |
| Physical Description: | 1 volume (various pagings) : illustrations ; 26 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0849300770 (alk. paper) |