Radio frequency power in plasmas : 14th topical conference, Oxnard, California, 7-9 May 2001 /

Bibliographic Details
Corporate Author: Topical Conference on Radio Frequency Power in Plasmas
Other Authors: Mau, T. K. (Tak Kuen), 1950-, DeGrassie, John
Format: Conference Proceeding Book
Language:English
Published: Melville, N.Y. : American Institute of Physics, 2001.
Series:AIP conference proceedings ; no. 595.
Subjects:
Description
Item Description:"Fourteenth Topical Conference on Radio Frequency Power in Plasmas"--P. xv.
Physical Description:xvi, 544 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0735400385
ISSN:0094-243X ;