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Advances in microelectronic device technology : 7-9 November 2001, Nanjing, China /

Bibliographic Details
Corporate Authors: International Conference on Advanced Microelectronic/Optoelectronic Device Technology Nanjing, Jiangsu Sheng, China, Society of Photo-optical Instrumentation Engineers, Dong nan da xue, China Optics & Optoelectronic Manufacturers Association, Zhongguo dian zi xue hui (Jiangsu Sheng, China), Laser and Optical Engineering Society (Jiangsu Sheng, China)
Other Authors: Tong, Qin-Yi, Gösele, U.
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4600.
Subjects:
Microelectromechanical systems > Technological innovations > Congresses.
Optoelectronic devices > Technological innovations > Congresses.
Integrated circuits > Congresses.
Description
Item Description:"First International Conference on Advanced Microelectronic/Optoelectronic Device Technology ... part of SPIE International Symposium on Optoelectronics and Microelectronics"--P. xi.
Physical Description:xi, 212 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819443395