Proceedings 2001 : International Symposium on Microelectronics, October 9-11, 2001, Baltimore Convention Center, Baltimore, Maryland /
| Corporate Authors: | , , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Washington, D.C. : [Bellingham, Washington] :
IMAPS ; [Published in cooperation with SPIE--the International Society for Optical Engineering],
[2001]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4587. |
| Subjects: |
| Physical Description: | xix, 782 pages : illustrations, portraits ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0930815645 |