Cover Image

MOEMS and miniaturized systems II : 22-24 October 2001, San Francisco, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Motamedi, M. Edward, Göring, Rolf
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4561.
Subjects:
Microelectromechanical systems > Congresses.
Miniature electronic equipment > Congresses.
Micromechanics > Congresses.
Optical scanners > Congresses.
Description
Physical Description:xxv, 350 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819442895