rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Surface scattering and diffraction for advanced metrology
    sub title: 1 August 2001, San Diego, USA
  name:
    name part: Gu, Zu-Han.
  name:
    name part: Maradudin, Alexei A.
    name part: 1931-
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2001
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: vii, 164 pages : illustrations ; 28 cm.
  note: Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Surface roughness
    topic: Measurement
    genre: Congresses
  subject:
    topic: Diffractive scattering
    genre: Congresses
  subject:
    topic: Optical measurements
    genre: Congresses
  subject:
    topic: Scattering (Physics)
    genre: Congresses
  subject:
    topic: Metrology
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 4447
  identifier: 0819441619
  record info:
    record content source: CUS
    record creation date: 011206
    record change date: 20151023122131.0
    record identifier: in00001651411