Society of Photo-optical Instrumentation Engineers, Kley, E., & Herzig, H. P. (2001). Lithographic and micromachining techniques for optical component fabrication: 29-30 July 2001, San Diego, USA. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, Ernst-Bernhard Kley, and Hans Peter Herzig. Lithographic and Micromachining Techniques for Optical Component Fabrication: 29-30 July 2001, San Diego, USA. Bellingham, Washington: SPIE, 2001.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Lithographic and Micromachining Techniques for Optical Component Fabrication: 29-30 July 2001, San Diego, USA. SPIE, 2001.
Warning: These citations may not always be 100% accurate.