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Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany /

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Bibliographic Details
Corporate Authors: European Optical Society, Wissenschaftliche Gesellschaft Lasertechnik, Society of Photo-optical Instrumentation Engineers
Other Authors: Gorecki, Christophe, Jüptner, Werner P. O., Kujawińska, Małgorzata
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4400.
Subjects:
Quality control > Optical methods > Congresses.
Optical detectors > Industrial applications > Congresses.
Microelectronics > Congresses.
Microelectromechanical systems > Congresses.
Interferometry > Congresses.
Measurement > Congresses.
Description
Physical Description:v, 176 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819440957