Materials science of thin films : deposition and structure /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
San Diego, CA :
Academic Press,
2002.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Publisher description Table of contents |
| Physical Description: | xxi, 794 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0125249756 (alk. paper) 9780125249751 (alk. paper) |