ASMC 2001 : the 12th Annual as printed] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.].

Bibliographic Details
Corporate Authors:	IEEE/SEMI Advanced Semiconductor Manufacturing Conference Munich, Germany, IEEE Electron Devices Society, Semiconductor Equipment and Materials International
Format:	Conference Proceeding Book
Language:	English
Published:	Piscataway, New Jersey : San Jose, California : IEEE ; SEMI, [2001]
Subjects:	Semiconductor industry > Congresses. Semiconductors > Design and construction > Congresses. Process control > Congresses.

Description
Item Description:	Cover title. "IEEE Catalog Number 01CH37150"--Title page verso.
Physical Description:	[xi], 244 pages : illustrations ; 29 cm.
Bibliography:	Includes bibliographical references.
ISBN:	0780365550 (softbound) 0780365569 (microfiche)