APA (7th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference Munich, Germany, IEEE Electron Devices Society, & Semiconductor Equipment and Materials International. (2001). ASMC 2001: The 12th Annual as printed] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.]. IEEE ; SEMI.

Chicago Style (17th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference Munich, Germany, IEEE Electron Devices Society, and Semiconductor Equipment and Materials International. ASMC 2001: The 12th Annual as Printed] : April 23-24, International Conference Center, Munich Germany / Sponsored by: [IEEE] Electron Devices Society ... [et Al.]. Piscataway, New Jersey : San Jose, California: IEEE ; SEMI, 2001.

MLA (9th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference Munich, Germany, et al. ASMC 2001: The 12th Annual as Printed] : April 23-24, International Conference Center, Munich Germany / Sponsored by: [IEEE] Electron Devices Society ... [et Al.]. IEEE ; SEMI, 2001.