rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamental aspects of silicon oxidation
  name:
    name part: Chabal, Yves Jean
    name part: 1952-
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: gw
    date issued: 2001
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiii, 260 pages : illustrations (some color) ; 24 cm.
  note: Yves J. Chabal (ed.).
  note: Includes bibliographical references and index.
  subject:
    topic: Silicon oxide
  classification: QD181.S6 F85 2001
  classification: 546/.6832
  related item:
    title info:
      title: Springer series in materials science ; v. 46
  identifier: 354041682X (alk. paper)
  identifier: 2001020054
  record info:
    record content source: DLC
    record creation date: 010126
    record change date: 20151023062222.0
    record identifier: in00001641406