Cover Image

Fundamental aspects of silicon oxidation /

Bibliographic Details
Other Authors: Chabal, Yves Jean, 1952-
Format: Book
Language:English
Published: Berlin ; New York : Springer, [2001]
Series:Springer series in materials science ; v. 46.
Subjects:
Silicon oxide.
Description
Physical Description:xiii, 260 pages : illustrations (some color) ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:354041682X (alk. paper)