Chemical-Mechanical Polishing 2000 San Francisco, Calif, & Singh, R. K. (2001). Chemical-Mechanical Polishing 2000: Fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. Materials Research Society.
Chicago Style (17th ed.) CitationChemical-Mechanical Polishing 2000 San Francisco, Calif, and R. K. Singh. Chemical-Mechanical Polishing 2000: Fundamentals and Materials Issues : Symposium Held April 26-27, 2000, San Francisco, California, U.S.A. Warrendale, Pa.: Materials Research Society, 2001.
MLA (9th ed.) CitationChemical-Mechanical Polishing 2000 San Francisco, Calif, and R. K. Singh. Chemical-Mechanical Polishing 2000: Fundamentals and Materials Issues : Symposium Held April 26-27, 2000, San Francisco, California, U.S.A. Materials Research Society, 2001.