Cover Image

Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Tobin, Kenneth W., Lakhani, Fred
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4275.
Subjects:
Surfaces (Technology) > Measurement.
Surfaces (Technology) > Defects.
Quality control > Optical methods > Congresses.
Optical measurements > Congresses.
Lasers > Industrial applications > Congresses.
Description
Physical Description:vii, 156 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819439533