Cover Image

Laser applications in microelectronic and optoelectronic manufacturing VI : 22-24 January 2001, San Jose, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Gower, M. (Malcolm), 1946-
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4274.
Subjects:
Microelectronics industry > Congresses.
Lasers > Industrial applications > Congresses.
Manufacturing processes > Congresses.
Optoelectronics industry > Congresses.
Description
Physical Description:x, 506 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819439525