Society of Photo-optical Instrumentation Engineers & Gower, M. (2001). Laser applications in microelectronic and optoelectronic manufacturing VI: 22-24 January 2001, San Jose, USA. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and M. Gower. Laser Applications in Microelectronic and Optoelectronic Manufacturing VI: 22-24 January 2001, San Jose, USA. Bellingham, Wash., USA: SPIE, 2001.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and M. Gower. Laser Applications in Microelectronic and Optoelectronic Manufacturing VI: 22-24 January 2001, San Jose, USA. SPIE, 2001.
Warning: These citations may not always be 100% accurate.