Chemical vapor deposition /

Bibliographic Details
Other Authors: Park, Jong-Hee, 1951-, Sudarshan, T. S., 1955-
Format: Book
Language:English
Published: Materials Park, OH : ASM International, 2001.
Series:Surface engineering series ; v. 2.
Subjects:
Description
Physical Description:vii, 481 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references.
ISBN:0871707314
9780871707314