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Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A /

Bibliographic Details
Other Authors: Oehrlein, G. S.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2001]
Series:Materials Research Society symposia proceedings ; v. 612.
Subjects:
Semiconductors > Materials > Congresses.
Semiconductors > Junctions > Congresses.
Dielectric films > Congresses.
Integrated circuits > Materials > Congresses.
Integrated circuits > Reliability > Congresses.
Description
Physical Description:1 volume (various pagings) : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558994270