http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Design, test, integration, and packaging of MEMS/MOEMS 2001
Centre national de la recherche scientifique (France)
Bernard Courtois [and others] chairs/editors ; sponsored by CNRS-INPG-UJF (France) [and others].
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4408