Cover Image

Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France /

Bibliographic Details
Corporate Author: Centre national de la recherche scientifique (France)
Other Authors: Courtois, B. (Bernard)
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4408.
Subjects:
Microelectromechanical systems > Congresses.
Optoelectronic devices > Congresses.
Micromachining > Congresses.
Microelectronic packaging > Congresses.
Description
Physical Description:xvi, 558 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819441090