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17th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 13-14 November 2000, Munich, Germany /

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Bibliographic Details
Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Society of Photo-optical Instrumentation Engineers
Other Authors: Behringer, Uwe
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4349.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.
Description
Physical Description:x, 192 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819440396