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High purity silicon VI : proceedings of the Sixth International Symposium /

Bibliographic Details
Corporate Authors: International Symposium on High Purity Silicon Phoenix, Arizona, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting, Society of Photo-optical Instrumentation Engineers
Other Authors: Claeys, Cor L.
Format: Conference Proceeding Book
Language:English
Published: Pennington, New Jersey : Bellingham, Washington : Electrochemical Society ; SPIE, [2000]
Series:Proceedings (Electrochemical Society) ; 2000-17.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4218.
Subjects:
Silicon diodes > Congresses.
Silicon crystals > Congresses.
Crystal growth > Congresses.
Semiconductor wafers > Congresses.
Description
Item Description:"... papers that were presented at the Sixth Symposium on High Purity Silicon held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000."--Preface.
Physical Description:xix, 696 pages : illustrations ; 23 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1566772842