International Symposium on High Purity Silicon Phoenix, Arizona, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting, Society of Photo-optical Instrumentation Engineers, & Claeys, C. L. (2000). High purity silicon VI: Proceedings of the Sixth International Symposium. Electrochemical Society ; SPIE.
Chicago Style (17th ed.) CitationInternational Symposium on High Purity Silicon Phoenix, Arizona, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting, Society of Photo-optical Instrumentation Engineers, and Cor L. Claeys. High Purity Silicon VI: Proceedings of the Sixth International Symposium. Pennington, New Jersey : Bellingham, Washington: Electrochemical Society ; SPIE, 2000.
MLA (9th ed.) CitationInternational Symposium on High Purity Silicon Phoenix, Arizona, et al. High Purity Silicon VI: Proceedings of the Sixth International Symposium. Electrochemical Society ; SPIE, 2000.