Rapid thermal and other short-time processing technologies : proceedings of the International Symposium /

Bibliographic Details
Corporate Authors:	Electrochemical Society. Electronics Division, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. High Temperature Materials Division, Electrochemical Society. Meeting, International Symposium on Rapid Thermal and Other Short-Time Processing Technologies
Other Authors:	Roozeboom, Fred
Format:	Conference Proceeding Book
Language:	English
Published:	Pennington, N.J. : Electrochemical Society, [2000]
Series:	Proceedings (Electrochemical Society) ; v. 2000-9.
Subjects:	Integrated circuits > Design and construction > Congresses. Manufacturing processes > Congresses.

Description
Item Description:	"The international symposium on Rapid Thermal and Other Short-Time Processing Technologies I was held from May 14 through May 18, 2000 in Toronto, Canada as part of the 197th Meeting of the Electrochemical Society."--Preface.
Physical Description:	xii, 462 pages : illustrations ; 23 cm.
Bibliography:	Includes bibliographic references and indexes.
ISBN:	1566772745