http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
proceedings of the International Symposium
Symposium on Plasma Processing 2000 : Toronto, Canada)
Dielectric Science and Technology Division.
International Symposium on Plasma Processing 2000 : Toronto, Canada)
editor G.S. Mathad ; assistant editors, G.K. Celler [and others].
"Dielectric Science and Technology and Electronics Divisions."
"This proceedings volume contains the papers presented at the thirteenth symposium on Plasma Processing ... held as part of the 197th meeting of the Electrochemical Society, Inc. in Toronto, Canada, May 14-19, 2000."--Preface.
Includes bibliographical references and indexes.
Proceedings (Electrochemical Society) ; 2000-6