http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Microlithographic techniques in integrated circuit fabrication II
Microlithographic techniques in integrated circuit fabrication two
Microlithographic techniques in integrated circuit fabrication 2
Microlithographic techniques in IC fabrication
Society of Photo-optical Instrumentation Engineers
Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore), SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others].
Earlier conference has title: Microlithographic techniques in IC fabrication.
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4226