rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microlithographic techniques in integrated circuit fabrication II
    sub title: 28-30 November 2000, Singapore
  title info:
    title: Microlithographic techniques in integrated circuit fabrication two
  title info:
    title: Microlithographic techniques in integrated circuit fabrication 2
  title info:
    title: Microlithographic techniques in IC fabrication
  name:
    name part: Mack, Chris A.
  name:
    name part: Yuan, Xiaocong.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: Nanyang Technological University
  name:
    name part: Institute of Physics, Singapore
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2000
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xv, 194 pages : illustrations ; 28 cm.
  note: Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore), SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others].
  note: Earlier conference has title: Microlithographic techniques in IC fabrication.
  note: Includes bibliographical references and index.
  subject:
    topic: Microlithography
    topic: Industrial applications
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Inspection
    genre: Congresses
  subject:
    topic: Process control
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 4226
  identifier: 0819438987
  record info:
    record content source: CUS
    record creation date: 010227
    record change date: 20151023053627.0
    record identifier: in00001612727