Ion implantation for materials processing /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Data Corp.,
1983.
|
| Series: | Chemical technology review.
no. 224. |
| Subjects: |
| Physical Description: | x, 244 pages : illustrations ; 25 cm. |
|---|---|
| Bibliography: | Bibliography: pages 240-244. |
| ISBN: | 0815509618 : |
| ISSN: | 0198-6880 ; |