Smidt, F. A. (1983). Ion implantation for materials processing. Noyes Data Corp..
Chicago Style (17th ed.) CitationSmidt, F. A. Ion Implantation for Materials Processing. Park Ridge, N.J., U.S.A.: Noyes Data Corp., 1983.
MLA (9th ed.) CitationSmidt, F. A. Ion Implantation for Materials Processing. Noyes Data Corp., 1983.
Warning: These citations may not always be 100% accurate.