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Microsystem technology /

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Bibliographic Details
Main Author: Menz, W. (Wolfgang)
Other Authors: Mohr, J. (Jürgen), Paul, Oliver
Format: Book
Language:English
Published: Weinheim ; New York : Wiley-VCH, 2001.
Subjects:
Microelectronics.
Description
Physical Description:xii, 500 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [465]-483) and index.
ISBN:3527296344
9783527296347