The science and engineering of microelectronic fabrication /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press,
2001.
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| Edition: | 2nd ed. |
| Series: | Oxford series in electrical and computer engineering.
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| Subjects: |
| Physical Description: | xiv, 603 pages : illustrations ; 25 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0195136055 |