APA (7th ed.) Citation

Campbell, S. A. (2001). The science and engineering of microelectronic fabrication (2nd ed.). Oxford University Press.

Chicago Style (17th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York: Oxford University Press, 2001.

MLA (9th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. Oxford University Press, 2001.