The 14th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001 /
| Corporate Authors: | , |
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Piscataway N.J. :
Institute of Electrical and Electronics Engineers,
[2001]
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| Subjects: |
| Item Description: | "IEEE Catalog Number: 01CH37090"--Title page verso. Ahead of title : "Technical Digest". |
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| Physical Description: | xxxviii, 610 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 0780359984 0780359992 (casebound) 0780362500 (microfiche) |