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Plasma charging damage /

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Bibliographic Details
Main Author: Cheung, Kin P.
Format: Book
Language:English
Published: London ; New York : Springer, [2001]
Subjects:
Semiconductors > Effect of radiation on.
Metal oxide semiconductors > Defects.
Plasma radiation.
Description
Physical Description:xii, 346 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1852331445 (alk. paper)