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Handbook of advanced plasma processing techniques /

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Bibliographic Details
Other Authors: Shul, R. J., Pearton, S. J.
Format: Book
Language:English
Published: Berlin ; New York : Springer, [2000]
Subjects:
Plasma engineering.
Electronic circuits > Design and construction.
Plasma etching.
Plasma spraying.
Description
Physical Description:xvi, 653 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540667725 (Berlin : alk. paper)