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Microelectromechanical systems : advanced materials and fabrication methods /

Bibliographic Details
Corporate Authors: National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, NetLibrary, Inc
Format: eBook
Language:English
Published: Washington, DC : National Academy Press, 1997.
Subjects:
Microelectronics > Materials.
Microelectromechanical systems > Design and construction.
Electronic books.
Microélectronique > Matériaux.
Micromachines > Conception et construction.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xiv, 61 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references (pages 51-55).
ISBN:0585002509 (electronic bk.)
9780585002507 (electronic bk.)