Microsystem design /

Bibliographic Details
Main Author:	Senturia, Stephen D., 1940-
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic Publishers, [2001]
Subjects:	Microelectromechanical systems > Design and construction. System design. Microelectronics.

Description
Physical Description:	xxvi, 689 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references (pages [665]-676) and index.
ISBN:	0792372468 (alk. paper)