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Run-to-run control in semiconductor manufacturing /

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Bibliographic Details
Other Authors: Moyne, James, Del Castillo, Enrique, Hurwitz, Arnon Max
Format: Book
Language:English
Published: Boca Raton, Fla. : CRC Press, [2001]
Subjects:
Semiconductors > Design and construction.
Semiconductor industry > Production control.
Electronic packaging.
Production management.
Description
Physical Description:348 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0849311780 (alk. paper)