Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; New York :
Elsevier,
2000.
|
| Edition: | 1st ed. |
| Series: | Handbook of sensors and actuators ;
v. 8. |
| Subjects: |
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