Technology of integrated circuits /

Bibliographic Details
Main Author: Widmann, D. (Dietrich)
Other Authors: Mader, Hermann, Friedrich, H. (Hans), Dr.-Ing
Format: Book
Language:English
Published: Berlin ; New York : Springer, [2000]
Series:Springer series in advanced microelectronics. 2.
Subjects:
Description
Physical Description:xvii, 340 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [323]-328) and index.
ISBN:3540661999 (hc. : alk. paper)
ISSN:1437-0387 ;