http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
New methods, mechanisms, and models of vapor deposition
symposium held April 24-26, 2000, San Francisco, California, U.S.A
editors, Haydn N.G. Wadley, George H. Gilmer, William G. Barker.
Includes bibliographical references and indexes.
Materials Research Society symposia proceedings. v. 616