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Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors:	Merhari, Lhadi
Format:	Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2000]
Series:	Materials Research Society symposia proceedings ; v. 584.
Subjects:	Integrated circuits > Design and construction > Congresses. Nanotechnology > Congresses. Integrated circuits > Materials > Congresses. Molecular electronics > Congresses. Microlithography > Congresses.

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